The Phenom SEM microscopes are intuitive to use, fast to create
results and built to high quality standards. These core priciples have
been used to develop and create the Phenom ProX spectroscopy
system for best-in-class imaging and analysis. Compared to its
predecessors, it has at least 20% better resolution, and even better
user experience to address a wider range of applications, including
samples that are very sensitive to beam damage. As well as viewing
high-resolution images of microscopic structures, there is often a
need identify the different chemical elements in a specimen.
This is accomplished in the Phenom ProX with the Element Identifica-
tion (EID) software package and a specially designed and fully
integrated Energy Dispersive Spectrometer (EDS).
The Phenom ProX is the most extended solution for fast and user
friendly imaging and analysis. This is enhanced by additional sample
holders that allow for example sample tilting and cooling for imaging
an even greater diversity of samples.